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Proceedings Paper

Nanoscale optical features via hot-stamping of As2Se3 glass
Author(s): Sylvain Danto; Erick Koontz; Yi Zou; Tony O. Ogbuu; Benn Gleason; Peter Wachtel; Jonathan D. Musgraves; Juejun Hu; Kathleen Richardson
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Paper Abstract

Here we show our ability to fabricate two-dimensional (2D) gratings on chalcogenide glasses with peak-to-valley amplitude of ~200 nm. The fabrication method relies on the thermal nano-imprinting of the glass substrate or film in direct contact with a patterned stamp. Stamping experiments are carried out using a bench-top precision glass-molding machine, both on As2Se3 optically-polished bulk samples and thermally-evaporated thin films. The stamps consist of silicon wafers patterned with sub-micron lithographically defined features. We demonstrate that the fabrication method described here enables precise control of the glass’ viscosity, mitigates risks associated with internal structural damages such as dewetting, or parasitic crystallization. The stamping fidelity as a function of the Time-Force-Temperature regime is discussed, and further developments and potential applications are presented.

Paper Details

Date Published: 15 October 2013
PDF: 7 pages
Proc. SPIE 8884, Optifab 2013, 88841T (15 October 2013); doi: 10.1117/12.2029274
Show Author Affiliations
Sylvain Danto, CREOL, The College of Optics and Photonics, Univ. of Central Florida (United States)
Clemson Univ. (United States)
Erick Koontz, CREOL, The College of Optics and Photonics, Univ. of Central Florida (United States)
Clemson Univ. (United States)
Yi Zou, Univ. of Delaware (United States)
Tony O. Ogbuu, Univ. of Delaware (United States)
Benn Gleason, CREOL, The College of Optics and Photonics, Univ. of Central Florida (United States)
Clemson Univ. (United States)
Peter Wachtel, CREOL, The College of Optics and Photonics, Univ. of Central Florida (United States)
Clemson Univ. (United States)
Jonathan D. Musgraves, CREOL, The College of Optics and Photonics, Univ. of Central Florida (United States)
Clemson Univ. (United States)
IRradiance Glass, Inc. (United States)
Juejun Hu, Univ. of Delaware (United States)
Kathleen Richardson, CREOL, The College of Optics and Photonics, Univ. of Central Florida (United States)
Clemson Univ. (United States)


Published in SPIE Proceedings Vol. 8884:
Optifab 2013
Julie L. Bentley; Matthias Pfaff, Editor(s)

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