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Proceedings Paper

Non-contact metrology of aspheric surfaces based on MWLI technology
Author(s): G. Berger; J. Petter
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Paper Abstract

A non-contact optical scanning metrology solution measuring aspheric surfaces is presented, which is based on multi wavelength interferometry (MWLI). The technology yields high density 3D data in short measurement times (including set up time) and provides high, reproducible form measurement accuracy. It measures any asphere without restrictions in terms of spherical departures. In addition, measurement of a large variety of special optics is enabled, such as annular lenses, segmented optics, optics with diffractive steps, ground optics, optics made of opaque and transparent materials, and small and thin optics (e.g. smart phone lenses). The measurement instrument can be used under production conditions.

Paper Details

Date Published: 15 October 2013
PDF: 8 pages
Proc. SPIE 8884, Optifab 2013, 88840V (15 October 2013); doi: 10.1117/12.2029238
Show Author Affiliations
G. Berger, Luphos GmbH (Germany)
J. Petter, Luphos GmbH (Germany)

Published in SPIE Proceedings Vol. 8884:
Optifab 2013
Julie L. Bentley; Matthias Pfaff, Editor(s)

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