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Proceedings Paper

Vertical interferometer workstation for testing large spherical optics
Author(s): B. Truax
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Paper Abstract

The design of an interferometer workstation for the testing of large concave and convex spherical optics is presented. The workstation handles optical components and mounts up to 425 mm in diameter with mass of up to 40 kg with 6 axes of adjustment. A unique method for the implementation of focus, roll and pitch was used allowing for extremely precise adjustment. The completed system includes transmission spheres with f-numbers from f/1.6 to f/0.82 incorporating reference surface diameters of up to 306 mm and surface accuracies of better than 63 nm PVr. The design challenges and resulting solutions are discussed. System performance results are presented.

Paper Details

Date Published: 15 October 2013
PDF: 11 pages
Proc. SPIE 8884, Optifab 2013, 88840W (15 October 2013); doi: 10.1117/12.2028726
Show Author Affiliations
B. Truax, Zygo Corp. (United States)

Published in SPIE Proceedings Vol. 8884:
Optifab 2013
Julie L. Bentley; Matthias Pfaff, Editor(s)

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