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Proceedings Paper

Design and fabrication of silicon-based optofluidic waveguide platforms
Author(s): Lynnell U. Zempoaltecatl; Holger Schmidt; Aaron R. Hawkins
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Paper Abstract

Using silicon based microfabrication and materials we have developed a photonic platform capable of single bioparticle analysis. This platform combines liquid and hollow core waveguides on the micron-scale (5 μm x 12 μm) to isolate femtoliter sized sample volumes. Fluorescence excitation and signals in the visible range are directed into and out of the sample volume at an orthogonal angle to maximize signal-to-noise. This paper reveals the development path of these structures over several device generations including innovations in material, geometries, and fabrication techniques to increase detection sensitivity.

Paper Details

Date Published: 11 September 2013
PDF: 8 pages
Proc. SPIE 8812, Biosensing and Nanomedicine VI, 88120U (11 September 2013); doi: 10.1117/12.2028186
Show Author Affiliations
Lynnell U. Zempoaltecatl, Brigham Young Univ. (United States)
Holger Schmidt, Univ. of California, Santa Cruz (United States)
Aaron R. Hawkins, Brigham Young Univ. (United States)


Published in SPIE Proceedings Vol. 8812:
Biosensing and Nanomedicine VI
Hooman Mohseni; Massoud H. Agahi; Manijeh Razeghi, Editor(s)

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