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Proceedings Paper

Microprofilometry using a spatial carrier frequency interferometrical technique
Author(s): Gottfried Frankowski; Frank Schillke
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Paper Abstract

Parameters which describe the surface topoqraphy in terms are the spatial frequencies the qr of the siope They will become hiqher values f the object under investigation is a rough sample. The range of these parameters what can be detected is limited by the method o measuremnt including signal evaluation. The aim of this paper is to deal w)th the range of these parameters using the method of spatial heterodyne technique: I

Paper Details

Date Published: 1 August 1990
PDF: 12 pages
Proc. SPIE 1266, In-Process Optical Measurements and Industrial Methods, (1 August 1990); doi: 10.1117/12.20272
Show Author Affiliations
Gottfried Frankowski, Institute of Automation (Germany)
Frank Schillke, Institute of Automation (Germany)

Published in SPIE Proceedings Vol. 1266:
In-Process Optical Measurements and Industrial Methods
H. A. Macleod; Peter Langenbeck, Editor(s)

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