Share Email Print
cover

Proceedings Paper

Status of multi-beam long trace-profiler development
Author(s): Mikhail V. Gubarev; Daniel J. Merthe; Kiranmayee Kilaru; Thomas Kester; Brian Ramsey; Wayne R. McKinney; Peter Z. Takacs; A. Dahir; Valeriy V. Yashchuk
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The multi-beam long trace profiler (MB-LTP) is under development at NASA’s Marshall Space Flight Center. The traditional LTPs scans the surface under the test by a single laser beam directly measuring the surface figure slope errors. While capable of exceptional surface slope accuracy, the LTP single beam scanning has slow measuring speed. Metrology efficiency can be increased by replacing the single laser beam with multiple beams that can scan a section of the test surface at a single instance. The increase in speed with such a system would be almost proportional to the number of laser beams. The progress for a multi-beam long trace profiler development is presented.

Paper Details

Date Published: 27 September 2013
PDF: 7 pages
Proc. SPIE 8848, Advances in X-Ray/EUV Optics and Components VIII, 88480L (27 September 2013); doi: 10.1117/12.2027146
Show Author Affiliations
Mikhail V. Gubarev, NASA Marshall Space Flight Ctr. (United States)
Daniel J. Merthe, Lawrence Berkeley National Lab. (United States)
Kiranmayee Kilaru, NASA Marshall Space Flight Ctr. (United States)
Thomas Kester, NASA Marshall Space Flight Ctr. (United States)
Brian Ramsey, NASA Marshall Space Flight Ctr. (United States)
Wayne R. McKinney, Lawrence Berkeley National Lab. (United States)
Peter Z. Takacs, Brookhaven National Lab. (United States)
A. Dahir, Texas A&M Univ.-Commerce (United States)
Valeriy V. Yashchuk, Lawrence Berkeley National Lab. (United States)


Published in SPIE Proceedings Vol. 8848:
Advances in X-Ray/EUV Optics and Components VIII
Ali Khounsary; Shunji Goto; Christian Morawe, Editor(s)

© SPIE. Terms of Use
Back to Top