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Proceedings Paper

Surface metrology by phase contrast
Author(s): Lionel R. Baker
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Paper Details

Date Published: 1 August 1990
PDF: 9 pages
Proc. SPIE 1266, In-Process Optical Measurements and Industrial Methods, (1 August 1990); doi: 10.1117/12.20271
Show Author Affiliations
Lionel R. Baker, Sira Ltd. (United Kingdom)


Published in SPIE Proceedings Vol. 1266:
In-Process Optical Measurements and Industrial Methods
H. A. Macleod; Peter Langenbeck, Editor(s)

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