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Proceedings Paper

Interference pattern processing technique for optical phase measurement with applications in precision surface metrology
Author(s): W. Tischer
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Paper Details

Date Published: 1 August 1990
PDF: 9 pages
Proc. SPIE 1266, In-Process Optical Measurements and Industrial Methods, (1 August 1990); doi: 10.1117/12.20269
Show Author Affiliations
W. Tischer, Institute of Automation (Germany)


Published in SPIE Proceedings Vol. 1266:
In-Process Optical Measurements and Industrial Methods
H. A. Macleod; Peter Langenbeck, Editor(s)

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