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Proceedings Paper

In-situ film thickness monitoring in CVD and other thin film deposition processes
Author(s): Piet J. Severin
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Paper Details

Date Published: 1 August 1990
PDF: 7 pages
Proc. SPIE 1266, In-Process Optical Measurements and Industrial Methods, (1 August 1990); doi: 10.1117/12.20267
Show Author Affiliations
Piet J. Severin, Philips Research Labs. (Netherlands)


Published in SPIE Proceedings Vol. 1266:
In-Process Optical Measurements and Industrial Methods
H. A. Macleod; Peter Langenbeck, Editor(s)

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