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Proceedings Paper

Non-invasive measurement of ion currents in plasma assisted processes using an optical fiber Faraday ring ammeter
Author(s): Karl H. Guenther; Indu F. Saxena; Roy B. Torbert
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Paper Details

Date Published: 1 August 1990
PDF: 5 pages
Proc. SPIE 1266, In-Process Optical Measurements and Industrial Methods, (1 August 1990); doi: 10.1117/12.20266
Show Author Affiliations
Karl H. Guenther, CREOL/Univ. of Central Florida (United States)
Indu F. Saxena, Univ. of Alabama in Huntsville (United States)
Roy B. Torbert, Univ. of Alabama in Huntsville (United States)


Published in SPIE Proceedings Vol. 1266:
In-Process Optical Measurements and Industrial Methods
H. A. Macleod; Peter Langenbeck, Editor(s)

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