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Proceedings Paper

Engineering optical constants for broadband single layer antireflection coatings
Author(s): S. P. Huber; R. W. E. van de Kruijs; A. E. Yakshin; E. Zoethout; F. Bijkerk
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Paper Abstract

We developed and fabricated a single layer antireflection coating for the molybdenum/silicon multilayer mirrors.The 20 nm thin film of Si0.52C0.16N0.29, deposited by simultaneous electron beam evaporation and nitrogen ion implantation, causes a broadband suppression of the DUV reflectance with a maximum suppression at λ= 285 nm from 58% to 0.3%, corresponding to a factor of 195.

Paper Details

Date Published: 27 September 2013
PDF: 4 pages
Proc. SPIE 8848, Advances in X-Ray/EUV Optics and Components VIII, 884814 (27 September 2013); doi: 10.1117/12.2026546
Show Author Affiliations
S. P. Huber, FOM Institute DIFFER (Netherlands)
R. W. E. van de Kruijs, FOM Institute DIFFER (Netherlands)
A. E. Yakshin, FOM Institute DIFFER (Netherlands)
E. Zoethout, FOM Institute DIFFER (Netherlands)
F. Bijkerk, FOM Institute DIFFER (Netherlands)
Univ. Twente (Netherlands)


Published in SPIE Proceedings Vol. 8848:
Advances in X-Ray/EUV Optics and Components VIII
Ali Khounsary; Shunji Goto; Christian Morawe, Editor(s)

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