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Proceedings Paper

Finite-element based electromagnetic field simulations: benchmark results for isolated structures
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Paper Abstract

We use a finite-element method to obtain highly converged results for a nano-optical light scattering setup with a non-periodic geometry.

Paper Details

Date Published: 9 October 2013
PDF: 8 pages
Proc. SPIE 8880, Photomask Technology 2013, 88801Z (9 October 2013); doi: 10.1117/12.2026213
Show Author Affiliations
Sven Burger, JCMwave GmbH (Germany)
Zuse Institute Berlin (Germany)
Lin Zschiedrich, JCMwave GmbH (Germany)
Jan Pomplun, JCMwave GmbH (Germany)
Frank Schmidt, JCMwave GmbH (Germany)
Zuse Institute Berlin (Germany)

Published in SPIE Proceedings Vol. 8880:
Photomask Technology 2013
Thomas B. Faure; Paul W. Ackmann, Editor(s)

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