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Proceedings Paper

Non-touch thermal air-bearing shaping of x-ray telescope optics
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Paper Abstract

Molding glass by using air bearings is a promising procedure for inexpensive and high precision glass shaping. Thin glass sheets are sandwiched between air bearings and pushed flat while being thermally cycled. In this study, a novel device for shaping glass is created and tested using 0.5 mm thick, 100 mm round, Schott D263 wafers. Numerous samples were shaped with varying values for bearing-to-glass gap and maximum temperature, and were measured with a Shack Hartmann metrology tool. Glass was shaped with bearing-to-glass gaps of >50 μm, 36±2.5 μm, and 30.5±2.5 μm. The best peak-to-valley (P-V) flatness achieved is 6.7/3.6±0.5 μm for front/back of the glass sheet, using a gap of 36±2.5 μm. The average steady-state P-V achieved is 12 μm. Using the same device parameters, the best repeatability achieved over the whole 100 mm wafer is 2.7±0.5 μm P-V and 9.5 arcseconds RMS slope error. When looking at 60 mm sections, the repeatability improves to <1 μm P-V and 5±0.5 arcsec.

Paper Details

Date Published: 26 September 2013
PDF: 8 pages
Proc. SPIE 8861, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VI, 88610R (26 September 2013); doi: 10.1117/12.2026100
Show Author Affiliations
Edward Sung, Massachusetts Institute of Technology (United States)
Brandon Chalifoux, Massachusetts Institute of Technology (United States)
Mark L. Schattenburg, MIT Kavli Institute for Astrophysics and Space Research (United States)
Ralf K. Heilmann, MIT Kavli Institute for Astrophysics and Space Research (United States)


Published in SPIE Proceedings Vol. 8861:
Optics for EUV, X-Ray, and Gamma-Ray Astronomy VI
Stephen L. O'Dell; Giovanni Pareschi, Editor(s)

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