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Proceedings Paper

Broadband optical monitoring of filters fabricated using molecular beam deposition
Author(s): Shari Powell Fisher; Christopher C.H. Hale; Ian T. Muirhead; John Gordon H. Mathew; Robert J. Cornwell
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Paper Abstract

A broadband optical monitoring system to assist with the control of complex filter designs has been implemented on a newly installed Molecular Beam Deposition (MBD) facility which has been adapted for the growth of optical thin films. When depositing a multilayer structure like a Fabry- Perot etalon with very narrow features whose location depends upon a precise optical thickness the broadband optical monitor is an essential addition to process control. In addition to providing the capability to observe the growth of a sensitive optical feature the broadband optical monitor is used to calibrate other process control methods. This saves a considerable amount of processing time and demonstrates the cost effectiveness of such a system. By the judicious use of broadband optical monitoring a very high degree of control and efficiency is added to MBD processing of optical thin films. 1.

Paper Details

Date Published: 1 August 1990
PDF: 10 pages
Proc. SPIE 1266, In-Process Optical Measurements and Industrial Methods, (1 August 1990); doi: 10.1117/12.20260
Show Author Affiliations
Shari Powell Fisher, OCLI Optical Coatings Ltd. (United Kingdom)
Christopher C.H. Hale, OCLI Optical Coatings Ltd. (United Kingdom)
Ian T. Muirhead, OCLI Optical Coatings Ltd. (United Kingdom)
John Gordon H. Mathew, Heriot-Watt Univ. (United Kingdom)
Robert J. Cornwell, Heriot-Watt Univ. (United Kingdom)

Published in SPIE Proceedings Vol. 1266:
In-Process Optical Measurements and Industrial Methods
H. A. Macleod; Peter Langenbeck, Editor(s)

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