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Proceedings Paper

Development of large-field high-resolution hard x-ray imaging microscopy and microtomography with Fresnel zone plate objective
Author(s): Yoshio Suzuki; Akihisa Takeuchi; Yasuko Terada; Kentaro Uesugi; Shigeharu Tamura
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Paper Abstract

A hard x-ray imaging microscope system of high spatial resolution and large field of view (FOV) has been developed at the beamline 37 XU of SPring-8. By utilizing the 30 m-long experimental station, large magnification can be attained with a large diameter Fresnel zone plate (FZP) objective. Some configurations of microscope systems were tested. In a typical condition, a magnification of 133 and a FOV of 123 μm are attained using a FZP with a diameter of 310 μm and an outermost zone width of 100 nm, and the spatial resolution evaluated by observing resolution test chart is 160 nm in full pitch of periodic object with an exposure time of 1 s. When a FZP with an outermost zone width of 50 nm is used, a spatial resolution better than 100 nm is achieved. Phase-contrast imaging by Zernike’s method was also tested, and three dimensional measurement by computer tomography (CT) method was also carried out.

Paper Details

Date Published: 26 September 2013
PDF: 12 pages
Proc. SPIE 8851, X-Ray Nanoimaging: Instruments and Methods, 885109 (26 September 2013); doi: 10.1117/12.2025792
Show Author Affiliations
Yoshio Suzuki, Japan Synchrotron Radiation Research Institute (Japan)
Akihisa Takeuchi, Japan Synchrotron Radiation Research Institute (Japan)
Yasuko Terada, Japan Synchrotron Radiation Research Institute (Japan)
Kentaro Uesugi, Japan Synchrotron Radiation Research Institute (Japan)
Shigeharu Tamura, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 8851:
X-Ray Nanoimaging: Instruments and Methods
Barry Lai, Editor(s)

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