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Proceedings Paper

Focussed ion beam machining of an in-fibre 45° mirror for fibre end sensors
Author(s): J. Li; J. N. Sun; M. M. Miliar; J. M. Ritchie; X. Luo; R. R. J. Maier; D. P. Hand; W. N. MacPherson
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Paper Abstract

Focussed Ion Beam (FIB) machining has been demonstrated to be capable of fabricating nano and micro-structure elements. In this paper we demonstrate techniques to design and fabricate a 45° mirror on the end of both conventional single mode and multi-core fibres (MCF) using FIB processing. The mirror is finished by a two step process: first a scanning process is used to make a rough cut followed by a polishing process to create an optical surface finish. The machined 45° mirror can be accurately aligned with optical fibre core, which avoids issues associated with the alignment of external turning mirror components. Proof-of-concept tests demonstrate that the fabricated structure is capable of measuring two axis displacements interferometrically with a maximum displacement up to 1.0mm and an rms error of ~50nm.

Paper Details

Date Published: 20 May 2013
PDF: 4 pages
Proc. SPIE 8794, Fifth European Workshop on Optical Fibre Sensors, 879404 (20 May 2013); doi: 10.1117/12.2025714
Show Author Affiliations
J. Li, Heriot-Watt Univ. (United Kingdom)
J. N. Sun, Heriot-Watt Univ. (United Kingdom)
M. M. Miliar, Heriot-Watt Univ. (United Kingdom)
J. M. Ritchie, Heriot-Watt Univ. (United Kingdom)
X. Luo, Univ. of Huddersfield (United Kingdom)
R. R. J. Maier, Heriot-Watt Univ. (United Kingdom)
D. P. Hand, Heriot-Watt Univ. (United Kingdom)
W. N. MacPherson, Heriot-Watt Univ. (United Kingdom)


Published in SPIE Proceedings Vol. 8794:
Fifth European Workshop on Optical Fibre Sensors
Leszek R. Jaroszewicz, Editor(s)

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