Share Email Print

Proceedings Paper

Focussed ion beam machining of an in-fibre 45-degree mirror for fibre end sensors
Author(s): J. Li; J. N. Sun; M. M. Miliar; J. M. Ritchie; X. Luo; R. R. J. Maier; D. P. Hand; W. N. MacPherson
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Focussed Ion Beam (FIB) machining has been demonstrated to be capable of fabricating nano and micro-structure elements. In this paper we demonstrate techniques to design and fabricate a 45° mirror on the end of both conventional single mode and multi-core fibres (MCF) using FIB processing. The mirror is finished by a two step process: first a scanning process is used to make a rough cut followed by a polishing process to create an optical surface finish. The machined 45° mirror can be accurately aligned with optical fibre core, which avoids issues associated with the alignment of external turning mirror components. Proof-of-concept tests demonstrate that the fabricated structure is capable of measuring two axis displacements interferometrically with a maximum displacement up to 1.0mm and an rms error of ~50nm.

Paper Details

Date Published: 20 May 2013
PDF: 4 pages
Proc. SPIE 8794, Fifth European Workshop on Optical Fibre Sensors, 879404 (20 May 2013); doi: 10.1117/12.2025714
Show Author Affiliations
J. Li, Heriot-Watt Univ. (United Kingdom)
J. N. Sun, Heriot-Watt Univ. (United Kingdom)
M. M. Miliar, Heriot-Watt Univ. (United Kingdom)
J. M. Ritchie, Heriot-Watt Univ. (United Kingdom)
X. Luo, Univ. of Huddersfield (United Kingdom)
R. R. J. Maier, Heriot-Watt Univ. (United Kingdom)
D. P. Hand, Heriot-Watt Univ. (United Kingdom)
W. N. MacPherson, Heriot-Watt Univ. (United Kingdom)

Published in SPIE Proceedings Vol. 8794:
Fifth European Workshop on Optical Fibre Sensors
Leszek R. Jaroszewicz, Editor(s)

© SPIE. Terms of Use
Back to Top