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Proceedings Paper

Two-dimensional sub-5-nm hard x-ray focusing with MZP
Author(s): Markus Osterhoff; Matthias Bartels; Florian Döring; Christian Eberl; Thomas Hoinkes; Sarah Hoffmann; Tobias Liese; Volker Radisch; Arno Rauschenbeutel; Anna-Lena Robisch; Aike Ruhlandt; Felix Schlenkrich; Tim Salditt; Hans-Ulrich Krebs
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Paper Abstract

We present experiments carried out using a combined hard x-ray focusing set-up preserving the benefits of a large-aperture Kirckpatrick-Baez (KB) mirror system and a small focal length multilayer zone plane (MZP). The high gain KB mirrors produce a pre-focus of 400 nm × 200 nm; in their defocus, two MZP lenses of diameter of 1.6 μm and 3.7 μm have been placed, with focal lengths of 50 μm and 250 μm respectively. The lenses have been produced using pulsed laser deposition (PLD) and focused ion beam (FIB). Forward simulations including error models based on measured deviations, auto-correlation analysis and three-plane phase reconstruction support two-dimensional focus sizes of 4.3 nm × 4.7 nm (7:9 keV, W/Si)1 and 4.3 nm ×5.9 nm (13:8 keV, W/ZrO2), respectively.

Paper Details

Date Published: 27 September 2013
PDF: 8 pages
Proc. SPIE 8848, Advances in X-Ray/EUV Optics and Components VIII, 884802 (27 September 2013); doi: 10.1117/12.2025389
Show Author Affiliations
Markus Osterhoff, Georg-August-Univ. Göttingen (Germany)
Matthias Bartels, Georg-August-Univ. Göttingen (Germany)
Florian Döring, Georg-August-Univ. Göttingen (Germany)
Christian Eberl, Georg-August-Univ. Göttingen (Germany)
Thomas Hoinkes, Vienna Ctr. for Quantum Science and Technology (Austria)
Sarah Hoffmann, Georg-August-Univ. Göttingen (Germany)
Tobias Liese, Georg-August-Univ. Göttingen (Germany)
Volker Radisch, Georg-August-Univ. Göttingen (Germany)
Arno Rauschenbeutel, Vienna Ctr. for Quantum Science and Technology (Austria)
Anna-Lena Robisch, Georg-August-Univ. Göttingen (Germany)
Aike Ruhlandt, Georg-August-Univ. Göttingen (Germany)
Felix Schlenkrich, Georg-August-Univ. Göttingen (Germany)
Tim Salditt, Georg-August-Univ. Göttingen (Germany)
Hans-Ulrich Krebs, Georg-August-Univ. Göttingen (Germany)


Published in SPIE Proceedings Vol. 8848:
Advances in X-Ray/EUV Optics and Components VIII
Ali Khounsary; Shunji Goto; Christian Morawe, Editor(s)

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