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Proceedings Paper

Piezoelectricity of ZnO nano-rods array prepared by hydrothermal method
Author(s): Seon Hoon Kim; Tae Un Kim; Hyun Chul Ki; Doo Gun Kim; Ju Hyun Choi; Jin Hyeok Kim
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Paper Abstract

In this works, the piezoelectric devices of ZnO nano-rods were fabricated for piezoelectric sensor. The ZnO nano-rods were grown by hydrothermal synthesis through two-dimensional nano-patterns using a laser interference lithography. ZnO nano-rods were preferred orientation with c-axis and wurtzite structure. It was found that the electricity of nano-rod piezoelectric device was 8x10-7 Wh under the load of 0.8kgf. The piezoelectric behaviors are attributed to the direct compression of ZnO nano-rods by an external force. Therefore, the piezoelectric devices of ZnO nano-rods fabricated by hydrothermal methods were applicable to the pressure sensors.

Paper Details

Date Published: 26 September 2013
PDF: 6 pages
Proc. SPIE 8816, Nanoengineering: Fabrication, Properties, Optics, and Devices X, 88161I (26 September 2013); doi: 10.1117/12.2024972
Show Author Affiliations
Seon Hoon Kim, Korea Photonics Technology Institute (Korea, Republic of)
Tae Un Kim, Korea Photonics Technology Institute (Korea, Republic of)
Hyun Chul Ki, Korea Photonics Technology Institute (Korea, Republic of)
Doo Gun Kim, Korea Photonics Technology Institute (Korea, Republic of)
Ju Hyun Choi, Korea Photonics Technology Institute (Korea, Republic of)
Jin Hyeok Kim, Chonnam National Univ. (Korea, Republic of)


Published in SPIE Proceedings Vol. 8816:
Nanoengineering: Fabrication, Properties, Optics, and Devices X
Eva M. Campo; Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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