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Proceedings Paper

Corrosion-resistant Mg/SiC multilayer coatings for EUV laser sources in the 25-80nm wavelength region
Author(s): Regina Soufli; Mónica Fernández-Perea; Jeff C. Robinson; Sherry L. Baker; Jennifer Alameda; Christopher C. Walton; Luis Rodríguez-De Marcos; Jose A. Méndez; Juan I. Larruquert; Manuela Vidal-Dasilva; Eric M. Gullikson
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Paper Abstract

Mg/SiC multilayer coatings with Al-Mg corrosion barrier layers and with high reflectance in up to three narrow wavelength bands within the 25-80 nm wavelength region have been developed for EUV laser source applications. The physics of the spontaneous intermixing and amorphization of the Al-Mg corrosion barriers for Mg/SiC multilayers are currently being investigated in detail. Initial results from studies of the long-term reflectance properties of corrosionresistant Mg/SiC multlayers are also discussed.

Paper Details

Date Published: 27 September 2013
PDF: 7 pages
Proc. SPIE 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X, 88490D (27 September 2013); doi: 10.1117/12.2024955
Show Author Affiliations
Regina Soufli, Lawrence Livermore National Lab. (United States)
Mónica Fernández-Perea, Lawrence Livermore National Lab. (United States)
Jeff C. Robinson, Lawrence Livermore National Lab. (United States)
Sherry L. Baker, Lawrence Livermore National Lab. (United States)
Jennifer Alameda, Lawrence Livermore National Lab. (United States)
Christopher C. Walton, Lawrence Livermore National Lab. (United States)
Luis Rodríguez-De Marcos, Consejo Superior de Investigaciones Científicas (Spain)
Jose A. Méndez, Consejo Superior de Investigaciones Científicas (Spain)
Juan I. Larruquert, Consejo Superior de Investigaciones Científicas (Spain)
Manuela Vidal-Dasilva, Consejo Superior de Investigaciones Científicas (Spain)
Lawrence Berkeley National Lab. (United States)
Eric M. Gullikson, Lawrence Berkeley National Lab. (United States)


Published in SPIE Proceedings Vol. 8849:
X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X
Annie Klisnick; Carmen S. Menoni, Editor(s)

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