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Proceedings Paper

Antenna-coupled microbolometer based uncooled 2D array and camera for 2D real-time terahertz imaging
Author(s): F. Simoens; J. Meilhan; S. Gidon; G. Lasfargues; J. Lalanne Dera; J. L. Ouvrier-Buffet; S. Pocas; W. Rabaud; F. Guellec; B. Dupont; S. Martin; A. C. Simon
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Paper Abstract

CEA-Leti has developed a monolithic large focal plane array bolometric technology optimized for 2D real-time imaging in the terahertz range. Each pixel consists in a silicon microbolometer coupled to specific antennas and a resonant quarter-wavelength cavity. First prototypes of imaging arrays have been designed and manufactured for optimized sensing in the 1-3.5THz range where THz quantum cascade lasers are delivering high optical power. NEP in the order of 1 pW/sqrt(Hz) has been assessed at 2.5 THz. This paper reports the steps of this development, starting from the pixel level, to an array associated monolithically to its CMOS ROIC and finally a stand-alone camera. For each step, modeling, technological prototyping and experimental characterizations are presented.

Paper Details

Date Published: 24 September 2013
PDF: 10 pages
Proc. SPIE 8846, Terahertz Emitters, Receivers, and Applications IV, 88460O (24 September 2013); doi: 10.1117/12.2024861
Show Author Affiliations
F. Simoens, CEA-LETI (France)
J. Meilhan, CEA-LETI (France)
S. Gidon, CEA-LETI (France)
G. Lasfargues, CEA-LETI (France)
J. Lalanne Dera, CEA-LETI (France)
J. L. Ouvrier-Buffet, CEA-LETI (France)
S. Pocas, CEA-LETI (France)
W. Rabaud, CEA-LETI (France)
F. Guellec, CEA-LETI (France)
B. Dupont, CEA-LETI (France)
S. Martin, CEA-LETI (France)
A. C. Simon, CEA-LIST (France)

Published in SPIE Proceedings Vol. 8846:
Terahertz Emitters, Receivers, and Applications IV
Manijeh Razeghi; Alexei N. Baranov; John M. Zavada, Editor(s)

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