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Proceedings Paper

Optical testing with computer generated holograms: comprehensive error analysis
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Paper Abstract

Interferometry with computer generated holograms (CGHs) has become the industry standard for accurate measurements of aspheric optical surfaces. The CGH is a diffractive optical element that can be designed to create virtually any phase or amplitude distribution, and can be accurately manufactured using methods and equipment developed for integrated circuit production. Surface measurements with nanometer level precision can be performed using accurately wellcalibrated equipment. This paper provides a systematic analysis of all significant sources of error for CGH metrology, including encoding error, pattern distortion, substrate irregularity and calibration, and system alignment.

Paper Details

Date Published: 7 September 2013
PDF: 12 pages
Proc. SPIE 8838, Optical Manufacturing and Testing X, 88380H (7 September 2013); doi: 10.1117/12.2024742
Show Author Affiliations
Chunyu Zhao, Arizona Optical Metrology LLC (United States)
James H. Burge, Arizona Optical Metrology LLC (United States)


Published in SPIE Proceedings Vol. 8838:
Optical Manufacturing and Testing X
Oliver W. Fähnle; Ray Williamson; Dae Wook Kim, Editor(s)

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