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Proceedings Paper

Inch-scale high-throughput metrology of graphene and patterned graphene oxide
Author(s): Dennis Pleskot; Zafer Mutlu; Jeffrey Bell; Isaac Ruiz; Mihrimah Ozkan; Cengiz Ozkan
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Proc. SPIE 8839, Dimensional Optical Metrology and Inspection for Practical Applications II, 88390J; doi: 10.1117/12.2024732
Show Author Affiliations
Dennis Pleskot, University of California Riverside (United States)
Zafer Mutlu, University of California Riverside (United States)
Jeffrey Bell, University of California Riverside (United States)
Isaac Ruiz, University of California Riverside (United States)
Mihrimah Ozkan, University of California Riverside (United States)
Cengiz Ozkan, University of California Riverside (United States)


Published in SPIE Proceedings Vol. 8839:
Dimensional Optical Metrology and Inspection for Practical Applications II
Kevin G. Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)

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