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Proceedings Paper

Novel rapid polishing process for fabrication of sapphire windows
Author(s): Rajiv K. Singh; Arul Chakkaravarthi Arjunan; Kannan Balasundaram; Jinhyung Lee; George Ling; Deepika Singh
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Paper Abstract

Sapphire is uniquely suitable for sensor windows of electro-optical systems due to its high transparency, high mechanical strength, and chemical inactivity. Unfortunately, these same characteristics also cause polishing of sapphire windows to be extremely difficult and slow. Hence the challenge is to develop a process for affordable production of large area sapphire windows with low-roughness, low-stress and without surface and subsurface damage. Here we report a novel rapid chemical mechanical polishing process that increases the material removal rate during polishing of sapphire by greater than twofold over conventional processes. Such a process can also produce angstrom level surface finish.

Paper Details

Date Published: 30 September 2013
PDF: 8 pages
Proc. SPIE 8837, Material Technologies and Applications to Optics, Structures, Components, and Sub-Systems, 88370T (30 September 2013); doi: 10.1117/12.2024689
Show Author Affiliations
Rajiv K. Singh, Sinmat, Inc. (United States)
Arul Chakkaravarthi Arjunan, Sinmat, Inc. (United States)
Kannan Balasundaram, Sinmat, Inc. (United States)
Jinhyung Lee, Univ. of Florida (United States)
George Ling, Sinmat, Inc. (United States)
Deepika Singh, Sinmat, Inc. (United States)


Published in SPIE Proceedings Vol. 8837:
Material Technologies and Applications to Optics, Structures, Components, and Sub-Systems
Joseph L. Robichaud; Matthias Krödel; William A. Goodman, Editor(s)

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