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Proceedings Paper

Use of the surface PSD and incident angle adjustments to investigate near specular scatter from smooth surfaces
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Paper Abstract

The Rayleigh Rice vector perturbation theory has been successfully used for several decades to relate the surface power spectrum of optically smooth reflectors to the angular resolved scatter resulting from light sources of known wavelength, incident angle and polarization. While measuring low frequency roughness is relatively easy, the corresponding near specular scatter can be difficult to measure. This paper discusses using high incident angle near specular measurements along with profile generated surface power spectrums as a means of checking a near specular scatter requirement. The specification in question, a BRDF of 1.0 sr-1 at 2 mrad from the specular direction and at a wavelength of 1μm, is very difficult to verify by conventional scatter measurements. In fact, it is impractical to directly measure surface scatter from uncoated Zerodur because of its high bulk scatter. This paper presents profilometer and scatterometer data obtained from coated and uncoated flats at several wavelengths and outlines the analysis technique used to check this tight specification.

Paper Details

Date Published: 7 September 2013
PDF: 10 pages
Proc. SPIE 8838, Optical Manufacturing and Testing X, 883805 (7 September 2013); doi: 10.1117/12.2024612
Show Author Affiliations
Kashmira Tayabaly, College of Optical Sciences, The Univ. of Arizona (United States)
John C. Stover, The Scatter Works, Inc. (United States)
Robert E. Parks, College of Optical Sciences, The Univ. of Arizona (United States)
Optical Perspectives Group, LLC (United States)
Matthew Dubin, College of Optical Sciences, The Univ. of Arizona (United States)
James H. Burge, College of Optical Sciences, The Univ. of Arizona (United States)

Published in SPIE Proceedings Vol. 8838:
Optical Manufacturing and Testing X
Oliver W. Fähnle; Ray Williamson; Dae Wook Kim, Editor(s)

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