Share Email Print
cover

Proceedings Paper

Composition depth profiling by soft x-ray laser-ablation mass spectrometry
Author(s): Ilya Kuznetsov; Jorge Filevich; M. Woolston; Elliot R. Bernstein; Dean C. Crick; D. Carlton; W. Chao; E. H. Anderson; Jorge J. Rocca; Carmen S. Menoni
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Mass spectrometry plays a vital role in the direct examination of the chemical composition of solids. We have introduced the use of soft x-ray laser ablation for mass spectrometry imaging. Here we demonstrate the method potential for composition depth profiling of multilayer stacks consisting of tens of nanometers thick metal and dielectric films.

Paper Details

Date Published: 27 September 2013
PDF: 6 pages
Proc. SPIE 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X, 88490G (27 September 2013); doi: 10.1117/12.2024535
Show Author Affiliations
Ilya Kuznetsov, Colorado State Univ. (United States)
Jorge Filevich, Colorado State Univ. (United States)
M. Woolston, Colorado State Univ. (United States)
Elliot R. Bernstein, Colorado State Univ. (United States)
Dean C. Crick, Colorado State Univ. (United States)
D. Carlton, Colorado State Univ. (United States)
Lawrence Berkeley National Lab. (United States)
W. Chao, Colorado State Univ. (United States)
Lawrence Berkeley National Lab. (United States)
E. H. Anderson, Colorado State Univ. (United States)
Lawrence Berkeley National Lab. (United States)
Jorge J. Rocca, Colorado State Univ. (United States)
Carmen S. Menoni, Colorado State Univ. (United States)


Published in SPIE Proceedings Vol. 8849:
X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X
Annie Klisnick; Carmen S. Menoni, Editor(s)

© SPIE. Terms of Use
Back to Top