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Proceedings Paper

Realization of tellurium-based all dielectric optical metamaterials using a multi-cycle deposition-etch process
Author(s): Sheng Liu; Jon F Ihlefeld; Jason Dominguez; Edward F Gonzales; John Eric Bower; Bruce D Burckel; Michael B Sinclair; Igal Brener
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Proc. SPIE 8816, Nanoengineering: Fabrication, Properties, Optics, and Devices X, 88160T; doi: 10.1117/12.2024507
Show Author Affiliations
Sheng Liu, Sandia National Labs (United States)
Jon F Ihlefeld, Sandia National Labs (United States)
Jason Dominguez, Sandia National Labs (United States)
Edward F Gonzales, Sandia National Labs (United States)
John Eric Bower, Sandia National Labs (United States)
Bruce D Burckel, Sandia National Labs (United States)
Michael B Sinclair, Sandia National Labs (United States)
Igal Brener, Sandia National Labs (United States)


Published in SPIE Proceedings Vol. 8816:
Nanoengineering: Fabrication, Properties, Optics, and Devices X
Eva M. Campo; Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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