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Proceedings Paper

Coherent nanopatterning with table-top soft x-ray lasers
Author(s): W. Li; V. Martinez Esquiroz; D. Patel; L. Urbanski; C. S. Menoni; J. J. Rocca; A. Stein; W. Chao; E. Anderson; M. C. Marconi
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Paper Abstract

We describe a table top nanofabrication system that utilizes the coherent Talbot imaging effect and a table-top soft x ray laser to implement a defect-free compact nanolithography tool. The Talbot lithography provides a robust and simple setup capable of printing periodic structures over millimeter square areas free of defects. Test structures were fabricated into metal layers showing a complete coherent extreme ultraviolet lithographic process in a table-top system.

Paper Details

Date Published: 27 September 2013
PDF: 7 pages
Proc. SPIE 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X, 88490W (27 September 2013); doi: 10.1117/12.2024472
Show Author Affiliations
W. Li, Colorado State Univ. (United States)
V. Martinez Esquiroz, Colorado State Univ. (United States)
D. Patel, Colorado State Univ. (United States)
L. Urbanski, Colorado State Univ. (United States)
C. S. Menoni, Colorado State Univ. (United States)
J. J. Rocca, Colorado State Univ. (United States)
A. Stein, Brookhaven National Lab. (United States)
W. Chao, Lawrence Berkeley National Lab. (United States)
E. Anderson, Lawrence Berkeley National Lab. (United States)
M. C. Marconi, Colorado State Univ. (United States)


Published in SPIE Proceedings Vol. 8849:
X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X
Annie Klisnick; Carmen S. Menoni, Editor(s)

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