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Proceedings Paper

6-DOF displacement and angle measurements using heterodyne laser encoder
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Paper Abstract

In this research, a novel heterodyne laser encoder for 6-DOF displacement and angle measurements is proposed. The technique combines the advantages of heterodyne interferometry, grating shearing interferometry, and Michelson interferometry. When a heterodyne light beam with two orthogonally polarized directions is used to focus on a semi-transmission grating, two detection configurations for in-plane and out-of-plane will be obtained. By means of measuring the phase variations of the interfering signals from the moving grating, the in-plane displacement can be acquired. Besides, the out-of-plane displacement can be obtained by detecting the optical path difference between the reference beam and the reflection beam. Furthermore, 6-DOF displacement and angle information can be measured simultaneously by using the beam dividing method. According to the experimental results, the measurement resolution is about 2 nm. The experimental results show that our proposed method has the ability to measure 6-DOF displacement and angle information with high system stability. Comparing with other commercial measurement instructions, this laser encoder has the advantages of high resolution, high stability, and high flexibility.

Paper Details

Date Published: 20 September 2013
PDF: 8 pages
Proc. SPIE 8819, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII, 881909 (20 September 2013); doi: 10.1117/12.2024082
Show Author Affiliations
Ssu-Wen Pan, National Taiwan Univ. of Science and Technology (Taiwan)
Hung-Lin Hsieh, National Taiwan Univ. of Science and Technology (Taiwan)
Wei-Cheng Wang, National Taiwan Univ. of Science and Technology (Taiwan)


Published in SPIE Proceedings Vol. 8819:
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII
Michael T. Postek; Ndubuisi George Orji, Editor(s)

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