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Proceedings Paper

Development of a numerically controlled elastic emission machining system for fabricating mandrels of ellipsoidal focusing mirrors used in soft x-ray microscopy
Author(s): Yoshinori Takei; Takehiro Kume; Hiroto Motoyama; Kentaro Hiraguri; Hirokazu Hashizume; Hidekazu Mimura
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Paper Abstract

Ellipsoidal mirrors are one of the most promising types of X-ray mirror, because the mirror can focus X-rays to nanometer size with a large aperture and no chromatic aberration. However, so far ideal ellipsoidal mirrors cannot be realized by any manufacturing methods. One of the reasons is there is no fabrication method to process their inside surface with a diameter of several millimeters with nanometer-level accuracy. We propose and develop a manufacturing process of the ellipsoidal mirror. First, a master which has the reversed shape is prepared using grinding, polishing and Elastic Emission Machining (EEM). EEM can finish the surface shape to within 2nm (RMS). Then, the ellipsoidal mirror is produced by replicating the surface using an electroforming deposition method. By conducting the process without any stress at room temperature, replicating the surface roughness and shape with nanometer order accuracy is possible. In this paper, we report the current status of manufacturing of the ellipsoidal mirror.

Paper Details

Date Published: 27 September 2013
PDF: 10 pages
Proc. SPIE 8848, Advances in X-Ray/EUV Optics and Components VIII, 88480C (27 September 2013); doi: 10.1117/12.2023940
Show Author Affiliations
Yoshinori Takei, The Univ. of Tokyo (Japan)
Takehiro Kume, The Univ. of Tokyo (Japan)
Hiroto Motoyama, The Univ. of Tokyo (Japan)
Kentaro Hiraguri, Natsume Optical Corp. (Japan)
Hirokazu Hashizume, Natsume Optical Corp. (Japan)
Hidekazu Mimura, The Univ. of Tokyo (Japan)


Published in SPIE Proceedings Vol. 8848:
Advances in X-Ray/EUV Optics and Components VIII
Ali Khounsary; Shunji Goto; Christian Morawe, Editor(s)

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