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Proceedings Paper

Tabletop coherent diffraction imaging with a discharge plasma EUV source
Author(s): Larissa Juschkin; Lars Loetgering; Denis Rudolf; Rui Xu; Sascha Brose; Serhiy Danylyuk; Jianwei Miao
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Paper Abstract

We present a coherent diffraction imaging (CDI) experiment using a high-frequency discharge plasma based, extreme ultraviolet (EUV) source. By using different illumination geometries, we generated EUV beams witha varying degree of spatial coherence, which were used to produce far field diffraction patterns from test objects. We then successfully reconstructed an illumination wavefront defined by a circular aperture. The present work explores the feasibility of compact tabletop CDI using a discharge plasma EUV source emerged from the technology development of EUV lithography, which can potentially find application in nanoscience and metrology.

Paper Details

Date Published: 30 September 2013
PDF: 9 pages
Proc. SPIE 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X, 88490Y (30 September 2013); doi: 10.1117/12.2023895
Show Author Affiliations
Larissa Juschkin, RWTH Aachen (Germany)
Jülich Aachen Research Alliance (Germany)
Forschungszentrum Jülich GmbH (Germany)
Lars Loetgering, RWTH Aachen (Germany)
Jülich Aachen Research Alliance (Germany)
Denis Rudolf, Forschungszentrum Jülich GmbH (Germany)
Jülich Aachen Research Alliance (Germany)
Rui Xu, Univ. of California, Los Angeles (United States)
Sascha Brose, RWTH Aachen (Germany)
Jülich Aachen Research Alliance (Germany)
Serhiy Danylyuk, RWTH Aachen (Germany)
Jülich Aachen Research Alliance (Germany)
Jianwei Miao, Univ. of California, Los Angeles (United States)


Published in SPIE Proceedings Vol. 8849:
X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X
Annie Klisnick; Carmen S. Menoni, Editor(s)

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