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Proceedings Paper

Multilayer-based solutions for Extreme UV light with enhanced spectral purity
Author(s): Viacheslav Medvedev
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Date Published:
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Proc. SPIE 8848, Advances in X-Ray/EUV Optics and Components VIII, 88480M; doi: 10.1117/12.2023572
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Viacheslav Medvedev, FOM Institute DIFFER (Netherlands)


Published in SPIE Proceedings Vol. 8848:
Advances in X-Ray/EUV Optics and Components VIII
Ali Khounsary; Shunji Goto; Christian Morawe, Editor(s)

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