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Proceedings Paper

Design considerations in a novel fiber-coupled three degree-of-freedom displacement interferometer
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Paper Abstract

Optomechanical design considerations are presented in the development of a fiber-delivered three degree-offreedom displacement measuring interferometer. The tool can be used to simultaneously calibrate the linear motion and rotational errors of a translating stage using a single measurement beam incident on a plane mirror target. This novel interferometer incorporates a quadrant photodiode to measure four spatially separated interference signals all within a single optical interference beam, otherwise known as differential wavefront sensing. In post processing, a weighted phase average is created over symmetrically adjacent pairings of detector elements to decouple and measure displacement and changes in pitch and yaw. Design considerations include a custom displacement interferometer architecture, mechanical analyses and qualification testing of a working prototype. This interferometer has the potential for providing multi-DOF calibrations for precision motion stages.

Paper Details

Date Published: 18 September 2013
PDF: 9 pages
Proc. SPIE 8836, Optomechanical Engineering 2013, 883604 (18 September 2013); doi: 10.1117/12.2023358
Show Author Affiliations
Steven R. Gillmer, Univ. of Rochester (United States)
Jonathan D. Ellis, Univ. of Rochester (United States)

Published in SPIE Proceedings Vol. 8836:
Optomechanical Engineering 2013
Alson E. Hatheway, Editor(s)

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