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Proceedings Paper

Fabrication and performance evaluation of pixelated nano-wire grid polarizer
Author(s): Shengkui Gao; Raphael Njuguna; Viktor Gruev
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Paper Abstract

Metal-based nano-wire grid polarizer (NWGP) is widely used in division of focal plane (DoFP) imaging sensors to capture polarization information of the imaged environment. In this paper, we present a procedure for fabricating aluminum pixelated NWGP structures using electron beam lithography (EBL) and reactive ion etching (RIE). We evaluate optical performance of the NWGP structures in terms of different orientations (0°, 45°, 90°, 135°), line widths (50nm to 500nm), and spectral response (460nm to 625nm).

Paper Details

Date Published: 27 September 2013
PDF: 7 pages
Proc. SPIE 8873, Polarization Science and Remote Sensing VI, 88730L (27 September 2013); doi: 10.1117/12.2023115
Show Author Affiliations
Shengkui Gao, Washington Univ. in St. Louis (United States)
Raphael Njuguna, Washington Univ. in St. Louis (United States)
Viktor Gruev, Washington Univ. in St. Louis (United States)


Published in SPIE Proceedings Vol. 8873:
Polarization Science and Remote Sensing VI
Joseph A. Shaw; Daniel A. LeMaster, Editor(s)

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