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Laser computer-aided phase microscope with 10-nm resolution
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Paper Abstract

Previous measurements with computer-aided phase microscope using Linnik scheme with a dissector as coordinate sensitive detector showed an opportunity to obtain superdiffractional resolution d

Paper Details

Date Published: 1 August 1990
PDF: 4 pages
Proc. SPIE 1265, Industrial Inspection II, (1 August 1990); doi: 10.1117/12.20231
Show Author Affiliations
Vladimir P. Tychinsky, Moscow Institute for Radioengineering (Russia)
Alexander V. Tavrov, Moscow Institute for Radioengineering, (Germany)

Published in SPIE Proceedings Vol. 1265:
Industrial Inspection II
Donald W. Braggins, Editor(s)

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