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Proceedings Paper

Advance in dimensional measurements of nano-objects based on defocusing of the electron probe of a scanning electron microscope
Author(s): M. N. Filippov; V. P. Gavrilenko; V. B. Mityukhlyaev; A. V. Rakov; P. A. Todua
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Paper Abstract

New results for dimensional measurements of nanostructures obtained using the method of defocusing of the SEM electron probe are presented. The method is extended to nanostructures representing the protrusions of the trapezoidal form with the small size of the top base and the features (protrusions and trenches) with nearly vertical sidewalls. It is also shown that the method can be applied for measurements of geometric parameters of features located on resist masks as well as of individual nanoparticles.

Paper Details

Date Published: 20 September 2013
PDF: 12 pages
Proc. SPIE 8819, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII, 88190D (20 September 2013); doi: 10.1117/12.2023056
Show Author Affiliations
M. N. Filippov, JSC Ctr. for Surface and Vacuum Research (Russian Federation)
Moscow Institute of Physics and Technology (Russian Federation)
N.S. Kurnakov Institute of General and Inorganic Chemistry (Russian Federation)
V. P. Gavrilenko, JSC Ctr. for Surface and Vacuum Research (Russian Federation)
Moscow Institute of Physics and Technology (Russian Federation)
V. B. Mityukhlyaev, JSC Ctr. for Surface and Vacuum Research (Russian Federation)
A. V. Rakov, JSC Ctr. for Surface and Vacuum Research (Russian Federation)
P. A. Todua, JSC Ctr. for Surface and Vacuum Research (Russian Federation)
Moscow Institute of Physics and Technology (Russian Federation)


Published in SPIE Proceedings Vol. 8819:
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII
Michael T. Postek; Ndubuisi George Orji, Editor(s)

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