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Proceedings Paper

Numerical investigations of the influence of different commonly applied approximations in scatterometry
Author(s): J. Endres; S. Burger; M. Wurm; B. Bodermann
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Paper Abstract

At PTB we investigate the prospects of scatterometric methods for quantitative dimensional metrology of periodic micro- and nanostructures. Commonly applied approximations and simplifications may lead to contributions to the measurement uncertainty or even to systematic measurement errors. Here we present a short overview about the main effects connected with these simplifications. In particular we present numerical investigations of the influence of a finite beam size on the scatterometry results. The results indicate, that an impact of the finite beam size becomes significant only for tightly focused beams with a beam waist radius wo smaller than 10 μm.

Paper Details

Date Published: 13 May 2013
PDF: 9 pages
Proc. SPIE 8789, Modeling Aspects in Optical Metrology IV, 878904 (13 May 2013); doi: 10.1117/12.2022108
Show Author Affiliations
J. Endres, Physikalisch-Technische Bundesanstalt (Germany)
S. Burger, Physikalisch-Technische Bundesanstalt (Germany)
M. Wurm, Physikalisch-Technische Bundesanstalt (Germany)
B. Bodermann, Physikalisch-Technische Bundesanstalt (Germany)

Published in SPIE Proceedings Vol. 8789:
Modeling Aspects in Optical Metrology IV
Bernd Bodermann; Karsten Frenner; Richard M. Silver, Editor(s)

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