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Proceedings Paper

High-power and narrow-band excimer laser with a polarization-coupled resonator
Author(s): Nobuaki Furuya; Takuhiro Ono; Naoya Horiuchi; Keiichiro Yamanaka; Takeo Miyata
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Paper Details

Date Published: 1 June 1990
PDF: 12 pages
Proc. SPIE 1264, Optical/Laser Microlithography III, (1 June 1990); doi: 10.1117/12.20221
Show Author Affiliations
Nobuaki Furuya, Matsushita Research Institute Tokyo, Inc. (Japan)
Takuhiro Ono, Matsushita Research Institute Tokyo, Inc. (Japan)
Naoya Horiuchi, Matsushita Research Institute Tokyo, Inc. (Japan)
Keiichiro Yamanaka, Matsushita Research Institute Tokyo, Inc. (Japan)
Takeo Miyata, Matsushita Research Institute Tokyo, Inc. (Japan)


Published in SPIE Proceedings Vol. 1264:
Optical/Laser Microlithography III
Victor Pol, Editor(s)

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