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Proceedings Paper

Considering Babinet principle for optical lithography resolution limit exceeding classical resolving power
Author(s): Mircea V. Dusa; Dan V. Nicolau; Florin Fulga
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Paper Details

Date Published: 1 June 1990
PDF: 9 pages
Proc. SPIE 1264, Optical/Laser Microlithography III, (1 June 1990); doi: 10.1117/12.20220
Show Author Affiliations
Mircea V. Dusa, ICCE/CCSIT-CE Bucuresti (Romania)
Dan V. Nicolau, ICCE/CCSIT-CE Bucuresti (Romania)
Florin Fulga, ICCE/CCSIT-CE Bucuresti (Romania)


Published in SPIE Proceedings Vol. 1264:
Optical/Laser Microlithography III
Victor Pol, Editor(s)

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