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Proceedings Paper

Image-height offset in TTL on-axis alignment method
Author(s): Noriaki Ishio; Keiji Fujiwara; Hitoshi Nagata
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Paper Details

Date Published: 1 June 1990
PDF: 7 pages
Proc. SPIE 1264, Optical/Laser Microlithography III, (1 June 1990); doi: 10.1117/12.20219
Show Author Affiliations
Noriaki Ishio, Mitsubishi Electric Corp. (Japan)
Keiji Fujiwara, Mitsubishi Electric Corp. (Japan)
Hitoshi Nagata, Mitsubishi Electric Corp. (Japan)

Published in SPIE Proceedings Vol. 1264:
Optical/Laser Microlithography III
Victor Pol, Editor(s)

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