Share Email Print
cover

Proceedings Paper

Alignment performance of a 0.6-NA 364-nm laser direct writer
Author(s): Michael J. Bohan
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published: 1 June 1990
PDF: 14 pages
Proc. SPIE 1264, Optical/Laser Microlithography III, (1 June 1990); doi: 10.1117/12.20215
Show Author Affiliations
Michael J. Bohan, ATEQ Corp. (United States)


Published in SPIE Proceedings Vol. 1264:
Optical/Laser Microlithography III
Victor Pol, Editor(s)

© SPIE. Terms of Use
Back to Top