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Proceedings Paper

Alignment performance of a 0.6-NA 364-nm laser direct writer
Author(s): Michael J. Bohan
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Paper Details

Date Published: 1 June 1990
PDF: 14 pages
Proc. SPIE 1264, Optical/Laser Microlithography III, (1 June 1990); doi: 10.1117/12.20215
Show Author Affiliations
Michael J. Bohan, ATEQ Corp. (United States)

Published in SPIE Proceedings Vol. 1264:
Optical/Laser Microlithography III
Victor Pol, Editor(s)

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