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Proceedings Paper

X-ray refractive optics as a Fourier transformer for high resolution diffraction
Author(s): P. Ershov; S. Kuznetsov; I. Snigireva; V. Yunkin; A. Goikhman; A. Snigirev
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Paper Abstract

Refractive optics is proposed as a Fourier transformer for high resolution X-ray crystal diffraction. Employing refractive lenses the wave transmitted through the object transforms into spatial intensity distribution at its back focal plane according to the Fourier relations. A theoretical consideration of the Fourier transform technique is presented. Two types of samples were studied in Bragg reflection geometry: a grating made of strips of a thin SiO2 film on Si substrate and a grating made by profiling a Si crystal. Rocking curves of Si(111) Bragg reflection and corresponding Fourier patterns were analyzed.

Paper Details

Date Published: 3 May 2013
PDF: 9 pages
Proc. SPIE 8777, Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III, 877716 (3 May 2013); doi: 10.1117/12.2021476
Show Author Affiliations
P. Ershov, European Synchrotron Radiation Facility (France)
Immanuel Kant Baltic Federal Univ. (Russian Federation)
S. Kuznetsov, Institute of Microelectronics Technology (Russian Federation)
I. Snigireva, European Synchrotron Radiation Facility (France)
V. Yunkin, Institute of Microelectronics Technology (Russian Federation)
A. Goikhman, Immanuel Kant Baltic Federal Univ. (Russian Federation)
A. Snigirev, European Synchrotron Radiation Facility (France)


Published in SPIE Proceedings Vol. 8777:
Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III
Libor Juha; Saša Bajt; Richard London; René Hudec; Ladislav Pina, Editor(s)

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