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Proceedings Paper

Quantitative evaluation method for practical resolution by integration factor in optical lithography
Author(s): Hiroshi Ohtsuka; Kazutoshi Abe; Takeshi Taguchi
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Paper Details

Date Published: 1 June 1990
PDF: 8 pages
Proc. SPIE 1264, Optical/Laser Microlithography III, (1 June 1990); doi: 10.1117/12.20214
Show Author Affiliations
Hiroshi Ohtsuka, Oki Electric Industry Co., Ltd (Japan)
Kazutoshi Abe, Oki Electric Industry Co., Ltd (Japan)
Takeshi Taguchi, Oki Electric Industry Co., Ltd (Japan)


Published in SPIE Proceedings Vol. 1264:
Optical/Laser Microlithography III
Victor Pol, Editor(s)

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