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Proceedings Paper

Investigation of phase-conjugated stimulated Brillouin scattering at 248 nm for application to photolithography
Author(s): Anton K. Pfau; Detlev Proch; Friedrich G. Bachmann
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Paper Details

Date Published: 1 June 1990
PDF: 10 pages
Proc. SPIE 1264, Optical/Laser Microlithography III, (1 June 1990); doi: 10.1117/12.20213
Show Author Affiliations
Anton K. Pfau, Max-Planck-Institut fuer Quant (Germany)
Detlev Proch, Max-Planck-Institut fuer Quant (Germany)
Friedrich G. Bachmann, Siemens AG (Germany)

Published in SPIE Proceedings Vol. 1264:
Optical/Laser Microlithography III
Victor Pol, Editor(s)

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