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Proceedings Paper

Direct writing on structured substrate by pyrolytic laser deposition
Author(s): Janos Farkas; Andras Hamori; Zsolt Szabo
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Paper Details

Date Published: 1 June 1990
PDF: 7 pages
Proc. SPIE 1264, Optical/Laser Microlithography III, (1 June 1990); doi: 10.1117/12.20212
Show Author Affiliations
Janos Farkas, Central Research Institute for Physics (Hungary)
Andras Hamori, Central Research Institute for Physics (Hungary)
Zsolt Szabo, Central Research Institute for Physics (Hungary)


Published in SPIE Proceedings Vol. 1264:
Optical/Laser Microlithography III
Victor Pol, Editor(s)

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