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Proceedings Paper

Modeling latent image formation in photolithography using the Helmholtz equation
Author(s): H. Paul Urbach; Douglas A. Bernard
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Paper Details

Date Published: 1 June 1990
PDF: 16 pages
Proc. SPIE 1264, Optical/Laser Microlithography III, (1 June 1990); doi: 10.1117/12.20211
Show Author Affiliations
H. Paul Urbach, Philips Research Labs. (Netherlands)
Douglas A. Bernard, Philips Research Labs. (Netherlands)


Published in SPIE Proceedings Vol. 1264:
Optical/Laser Microlithography III
Victor Pol, Editor(s)

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