Share Email Print

Proceedings Paper

Modeling latent image formation in photolithography using the Helmholtz equation
Author(s): H. Paul Urbach; Douglas A. Bernard
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published: 1 June 1990
PDF: 16 pages
Proc. SPIE 1264, Optical/Laser Microlithography III, (1 June 1990); doi: 10.1117/12.20211
Show Author Affiliations
H. Paul Urbach, Philips Research Labs. (Netherlands)
Douglas A. Bernard, Philips Research Labs. (Netherlands)

Published in SPIE Proceedings Vol. 1264:
Optical/Laser Microlithography III
Victor Pol, Editor(s)

© SPIE. Terms of Use
Back to Top