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Proceedings Paper

Individually controlled multi-focus on a line for two-photon polymerization based on computer-generated holograms
Author(s): Jiawen Li; Liang Yang; Yanlei Hu; Chenchu Zhang; Jiaru Chu; Wenhao Huang
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Paper Abstract

Two-photon polymerization is a powerful technique in the area of functional micro/nano device fabrication. The greatest limiting factor in widespread use of this technique is the low efficiency because the structure is fabricated by point-by-point scanning. In recent years, computer generated hologram is used for parallel fabrication via multi foci. In this paper, we proposed a new rapid fabrication method which use desirable multi-focus pattern as scanning cell instead of single focus point or foci array to polymerize. We establish a femtosecond laser experimental setup involved in a liquid crystal spatial light modulator. The computer generated hologram pattern on spatial light modulator is used to produce desirable foci array. The position and intensity of each focus in the pattern can be controlled well by optimal design. We use multi foci in a line as scanning cell to fabricate some revolving structure and the Fresnel lens can be expected. This work provides a new method to greatly improve the efficiency of two-photon polymerization production in fabricating revolving structures.

Paper Details

Date Published: 22 June 2013
PDF: 4 pages
Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87691T (22 June 2013); doi: 10.1117/12.2021074
Show Author Affiliations
Jiawen Li, Univ. of Science and Technology of China (China)
Liang Yang, Univ. of Science and Technology of China (China)
Yanlei Hu, Univ. of Science and Technology of China (China)
Chenchu Zhang, Univ. of Science and Technology of China (China)
Jiaru Chu, Univ. of Science and Technology of China (China)
Wenhao Huang, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 8769:
International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013)
Chenggen Quan; Kemao Qian; Anand Asundi, Editor(s)

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