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Proceedings Paper

Fabrication of multilevel spiral phase plates by focused ion beam milling
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Paper Abstract

A focused Ga+ ion beam is used to mill a multilevel spiral phase plate at an acceleration voltage of 30 kV. Circular spiral phase plate with eight levels is fabricated directly on an indium-tin-oxide coated glass plate. Scanning electron microscopy images demonstrate the realization of multilevel phase plate on glass plate using focused ion beam milling.

Paper Details

Date Published: 22 June 2013
PDF: 7 pages
Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87691S (22 June 2013); doi: 10.1117/12.2021061
Show Author Affiliations
V. Pramitha, Indian Institute of Technology Madras (India)
A. Vijayakumar, Indian Institute of Technology Madras (India)
Shanti Bhattacharya, Indian Institute of Technology Madras (India)


Published in SPIE Proceedings Vol. 8769:
International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013)
Chenggen Quan; Kemao Qian; Anand Asundi, Editor(s)

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