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Proceedings Paper

Modeling and optimization of high index contrast gratings with aperiodic topologies
Author(s): Milan Maksimovic
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Paper Abstract

High-contrast gratings (HCG) are the ultra-thin elements set to operate in near-wavelength regime with the period of the grating smaller then wavelength and with the high-index grating fully surrounded by low-index material. We concentrate on topics scarcely explored in the literature such as the spectral response phenomenology of HCGs with the complex unit cells. We show that the spectral response is robust under the symmetric unit cell perturbations, while asymmetric unit cell perturbations may introduce completely new spectral response. Further, we show examples of highly fragmented spectra present in the case of HCGs with the aperiodic topology in the unit cell. Our results can serve as guidance for the design of the complex HCGs and help with the choice of the efficient initial grating topology prior to global optimization procedure.

Paper Details

Date Published: 13 May 2013
PDF: 12 pages
Proc. SPIE 8789, Modeling Aspects in Optical Metrology IV, 87890L (13 May 2013); doi: 10.1117/12.2021018
Show Author Affiliations
Milan Maksimovic, Focal 2.0 BV (Netherlands)


Published in SPIE Proceedings Vol. 8789:
Modeling Aspects in Optical Metrology IV
Bernd Bodermann; Karsten Frenner; Richard M. Silver, Editor(s)

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