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Proceedings Paper

Wavelength modulation-based method for interference phase detection with reduced optical complexity
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Paper Abstract

Although the laser interferometry represents the most precise class of techniques in the field of precise measurement of geometrical quantities, its wide use in measurement systems is still accompanied by many unresolved challenges. One of these challenges is the complexity of underlying optical systems. We present a novel approach to the interference phase detection - fringe subdivision - in the homodyne laser interferometry that aims at reduction of the optical complexity while the resolution is preserved. Our method employs a series of computational steps to infer a pair of signals in quadrature that allows to determine the interference phase with a sub-nanometre resolution from an interference signal from a non-polarising interferometer sampled by a single photodetector. The complexity trade-off is the use of laser beam with frequency modulation capability. The method was experimentally evaluated on a Michelson interferometer-based free-space setup and its performance has been compared to a traditional homodyne detection method. The results indicate the method is a feasible al­ ternative for the traditional homodyne detection since it performs with comparable accuracy (< 0.5nm standard deviation), especially where the optical setup complexity is principal issue and the modulation of laser beam is not a heavy burden, for instance in multi-axis measurement systems or laser diode based systems.

Paper Details

Date Published: 13 May 2013
PDF: 9 pages
Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 87883C (13 May 2013); doi: 10.1117/12.2020678
Show Author Affiliations
Šimon Řeřucha, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Martin Šarbort, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Zdeněk Buchta, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Bretislav Mikel, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Radek Šmíd, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Martin Čížek, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Petr Jedlička, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Jan Řerucha, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Josef Lazar, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Ondřej Číp, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)


Published in SPIE Proceedings Vol. 8788:
Optical Measurement Systems for Industrial Inspection VIII
Peter H. Lehmann; Wolfgang Osten; Armando Albertazzi, Editor(s)

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