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Proceedings Paper

High-repetition-rate KrF lithography excimer laser with narrow bandwidth below 2 pm
Author(s): Peter Lokai; Ulrich Rebhan; Peter Oesterlin; Hans-Juergen Kahlert; Dirk Basting
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Paper Details

Date Published: 1 June 1990
PDF: 9 pages
Proc. SPIE 1264, Optical/Laser Microlithography III, (1 June 1990); doi: 10.1117/12.20205
Show Author Affiliations
Peter Lokai, Lambda Physik GmbH (Germany)
Ulrich Rebhan, Lambda Physik GmbH (Germany)
Peter Oesterlin, Lambda Physik GmbH (Germany)
Hans-Juergen Kahlert, Lambda Physik GmbH (Germany)
Dirk Basting, Lambda Physik GmbH (Germany)

Published in SPIE Proceedings Vol. 1264:
Optical/Laser Microlithography III
Victor Pol, Editor(s)

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